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RIE Systems

The RIE family consists of single or twin chamber systems.

Features:

  • Turbomolecular pumping system for corrosive gases
  • Chemical rotary vane pump, fomblin oil or dry compressing pump
  • 13,56 MHz power supply with automatic matching network
  • Process gas box with MFC
  • Software control preprogrammed recipes. Service operation. Remote service control parameter
  • Low maintenance costs. Low service costs. Easy upgrade

 

Accessories:

  • Roots pumping system
  • Ion milling source (RIBE)
  • Electrostatic chuck up to Ø 200 mm
  • Gas helium substrates cooling
  • Laser and point detection

 

Applications:

  • Semiconductor
  • Microelectronic
  • Electron-optics

REQUEST INFORMATION: RIE Systems


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